In order to explore the internal relationship between industrial enterprises' social responsibility, market attention, enterprise size and green technology innovation, were analyzed based on the panel data of China's A-share listed industrial enterprises from 2013 to 2020. The results are as follows. The influence of industrial corporate social responsibility on green technology innovation has a positive effect, in which market attention plays a positive intermediary effect, and enterprise size can strengthen the role of corporate social responsibility in promoting green technology innovation. The results provide a new perspective and empirical evidence for promoting green technology innovation in industrial enterprises. It also provides some policy enlightenment for the realization of the "double carbon" goal.