Scientific and technological innovation is the internal logic of modern industrial development and a strong support for promoting high-quality economic development. Based on China's provincial panel data during the 13th Five Year Plan period, the impact of various elements of scientific and technological innovation on industrial development is analyzed . The results show that scientific and technological innovation plays an overall role in promoting industrial development, but the impact of various innovation factors varies greatly. Among them, scientific research investment, government macro-control and intellectual property rights have a significant positive impact on industrial development.There is no significant impact on the vitality of talent resources and technology trading market in Colleges and universities. According to the research results, relevant suggestions on scientific and technological innovation promoting industrial development during the 14th Five Year Plan period are put forward.