Based on the panel data of high-tech industries of 14 cities and states in Hunan province from 2010-2017, this article divided the innovative process of high-tech industries into technological research stage economic output stage by using two-stage data envelopment analysis(DEA) method, and studies the innovation performance efficiency of high-tech industries in various regions. The result of the research shows that high-tech industry in Hunan province can be devided into four industrial models: extensive, high R&D and low transformation, low R&D and high transformation, extensive, input-output mismatch and input redundancy exist in different stages. According to the empirical results, four decision-making references are put forward for improving the innovation performance of high-tech industry in Hunan province.