The Paper analyzes the situation on the high technology industry in Henan province, according to the relevant data of the China statistics yearbook on high technology industry, using the factor analysis method to evaluate the cluster level of high technology industry in henan province during 2003—2012. The results show that the cluster level of high technology industry is increasing year by year in henan province, being at a rate of slow growth and during 2003~2008, and has obviously increased since 2008 to 2012, which present that the cluster level of high technology industry in henan will be the trend of continually growth in next several years. Then the development scale on cluster of the high technology industry is the most influential factor of the cluster level.