The science and technology development level?is a key?factor to measure the?strength and economic?development potential of economic?and competition?of a country or region, It is crucial to evaluation of the?performance of scientific and technological innovation scientifically and reasonably. The article constructs the science and technology innovation performance evaluation index system of DEA evaluation method from the perspective of input-output.. Based on the related?data?of scientific and technological innovation?activities in Shanxi province, obtain the comprehensive efficiency,?pure technical efficiency and scale efficiency for each year and draw the trend graph of performance dynamic?technology innovation?development. Results showed that,?the science and technology achievement?development presents the?first decreased and then?increased;?science and technology performance?average?level is higher and?the non DEA effective?is due to?pure technical inefficiency?and scale inefficiency?intera ction?efficiency results.